VACUUM PUMP DEVICE AND LIFTING TYPE GATE VALVE

Uniform exhaustion can be realized with a relatively simple structure in a vacuum pump device.A vacuum pump portion includes an outer rotor and an inner stator, a lifting-type gate valve portion includes a valve body and a valve seat, and the valve body is lifted/lowered with respect to the valve se...

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Bibliographische Detailangaben
1. Verfasser: ENOMOTO, Yoshihiro
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Uniform exhaustion can be realized with a relatively simple structure in a vacuum pump device.A vacuum pump portion includes an outer rotor and an inner stator, a lifting-type gate valve portion includes a valve body and a valve seat, and the valve body is lifted/lowered with respect to the valve seat along a rotating shaft direction. And the inner stator includes a through hole along the rotating shaft direction of the vacuum pump portion, and at least a part of a supporting member which supports the valve body is disposed in the through hole.