APERTURE FOR ELECTROMAGNETIC RADIATION, METHOD FOR ALIGNING AN APERTURE, SYSTEM FOR APPLYING ELECTROMAGNETIC RADIATION ONTO A SOURCE MATERIAL AND DISPERSING ELEMENT

The present invention relates to an aperture (10) for electromagnetic radiation (100), preferably electromagnetic radiation (100) comprising a wavelength between 1 nm and 20 μm, comprising an aperture body (20) made of a body material (22) transparent for the electromagnetic radiation (100). Further...

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Bibliographische Detailangaben
Hauptverfasser: BRAUN, Wolfgang, WANKE, Robin
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The present invention relates to an aperture (10) for electromagnetic radiation (100), preferably electromagnetic radiation (100) comprising a wavelength between 1 nm and 20 μm, comprising an aperture body (20) made of a body material (22) transparent for the electromagnetic radiation (100). Further, the present invention relates to a method for aligning an aperture (10), and additionally to a system (70) for applying electromagnetic radiation (100) onto a source material and a dispersing element (90) for such a system (70).