PROCESSING SYSTEM
A processing system is provided that is easy to maintain when arranged laterally. The processing system (10) includes a plurality of cleaning units (10a - 10d), each cleaning unit (10a - 10d) including a processing chamber (13) located frontward and including a loading door (17) located at a front s...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A processing system is provided that is easy to maintain when arranged laterally. The processing system (10) includes a plurality of cleaning units (10a - 10d), each cleaning unit (10a - 10d) including a processing chamber (13) located frontward and including a loading door (17) located at a front surface for loading or unloading a workpiece and an inspection door (21) located at a rear surface, a control panel (43) arranged separately and rearward from the processing chamber (13) and having a substantially the same width as the processing chamber (13), and a step (31) arranged between the processing chamber (13) and the control panel (43) and having a substantially the same width as the processing chamber (13). The processing chambers (13) are laterally arranged to have front surfaces aligned for connecting each of the steps (31) to form a passage. |
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