METHOD FOR FABRICATION OF RIDGE WAVEGUIDES
A method for fabricating an optical waveguide comprises: providing a sample of lithium niobate doped with magnesium oxide and having at least one grating of periodic domain inversion defined therein; applying a layer of metallic zinc to a surface of the sample over the at least one grating using spu...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A method for fabricating an optical waveguide comprises: providing a sample of lithium niobate doped with magnesium oxide and having at least one grating of periodic domain inversion defined therein; applying a layer of metallic zinc to a surface of the sample over the at least one grating using sputter deposition; heating the sample in an atmosphere of pure oxygen to cause the zinc to indiffuse into the lithium niobate to form a waveguiding layer of increased refractive index under the surface of the sample; and using a dicing blade to cut two substantially parallel channels along a length direction of the at least one grating, to define a ridge waveguide between the two channels. |
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