PIEZOELECTRIC ELEMENT
Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a...
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| creator | UMEDA, Kenichi OKUNO, Yukihiro ARAKAWA, Takami |
| description | Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1-dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5 < a1/(b1 + b2 + b3) < 1.07. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3985746A4</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3985746A4</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3985746A43</originalsourceid><addsrcrecordid>eNrjZBAN8HSN8nf1cXUOCfJ0VgAyfF39QngYWNMSc4pTeaE0N4OCm2uIs4duakF-fGpxQWJyal5qSbxrgLGlham5iZmjiTERSgBrSB66</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PIEZOELECTRIC ELEMENT</title><source>esp@cenet</source><creator>UMEDA, Kenichi ; OKUNO, Yukihiro ; ARAKAWA, Takami</creator><creatorcontrib>UMEDA, Kenichi ; OKUNO, Yukihiro ; ARAKAWA, Takami</creatorcontrib><description>Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1-dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5 < a1/(b1 + b2 + b3) < 1.07.</description><language>eng ; fre ; ger</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230621&DB=EPODOC&CC=EP&NR=3985746A4$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230621&DB=EPODOC&CC=EP&NR=3985746A4$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>UMEDA, Kenichi</creatorcontrib><creatorcontrib>OKUNO, Yukihiro</creatorcontrib><creatorcontrib>ARAKAWA, Takami</creatorcontrib><title>PIEZOELECTRIC ELEMENT</title><description>Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1-dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5 < a1/(b1 + b2 + b3) < 1.07.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAN8HSN8nf1cXUOCfJ0VgAyfF39QngYWNMSc4pTeaE0N4OCm2uIs4duakF-fGpxQWJyal5qSbxrgLGlham5iZmjiTERSgBrSB66</recordid><startdate>20230621</startdate><enddate>20230621</enddate><creator>UMEDA, Kenichi</creator><creator>OKUNO, Yukihiro</creator><creator>ARAKAWA, Takami</creator><scope>EVB</scope></search><sort><creationdate>20230621</creationdate><title>PIEZOELECTRIC ELEMENT</title><author>UMEDA, Kenichi ; OKUNO, Yukihiro ; ARAKAWA, Takami</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3985746A43</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2023</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>UMEDA, Kenichi</creatorcontrib><creatorcontrib>OKUNO, Yukihiro</creatorcontrib><creatorcontrib>ARAKAWA, Takami</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>UMEDA, Kenichi</au><au>OKUNO, Yukihiro</au><au>ARAKAWA, Takami</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PIEZOELECTRIC ELEMENT</title><date>2023-06-21</date><risdate>2023</risdate><abstract>Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1-dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5 < a1/(b1 + b2 + b3) < 1.07.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | PIEZOELECTRIC ELEMENT |
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