PIEZOELECTRIC ELEMENT

PIEZOELECTRIC ELEMENT

Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: UMEDA, Kenichi, OKUNO, Yukihiro, ARAKAWA, Takami
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:Provided is a piezoelectric element that includes a piezoelectric layer formed of a perovskite-type oxide containing Pb and that has high drive reliability in a high-humidity environment. The piezoelectric element includes, in sequence, a substrate, a lower electrode layer, a growth control layer, a piezoelectric layer including a perovskite-type oxide containing lead as a main component of an A site, and an upper electrode layer. The growth control layer includes a metal oxide represented by MdN1-dOe, where M is one or more metal elements capable of substituting for the A site of the perovskite-type oxide. When the electronegativity of M is X, 1.41X - 1.05 ≤ d ≤ A1·exp(-X/t1) + y0, where A1 = 1.68 × 1012, t1 = 0.0306, and y0 = 0.59958. The perovskite-type oxide is represented by (Pba1αa2)(Zrb1Tib2βb3)Oc, where 0.5 < a1/(b1 + b2 + b3) < 1.07.