ACCELEROMETER DEVICE WITH IMPROVED BIAS STABILITY

An acceleration sensor (100) has a sensor mass (120) which is movably mounted over a substrate (120) by means of spring elements (130), so as to move along a movement axis (x), first trim electrodes (140), which are connected to the sensor mass (120), and sensor electrodes (160), which are connected...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	RUF, Markus, KÖNIG, Stefan
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An acceleration sensor (100) has a sensor mass (120) which is movably mounted over a substrate (120) by means of spring elements (130), so as to move along a movement axis (x), first trim electrodes (140), which are connected to the sensor mass (120), and sensor electrodes (160), which are connected to the sensor mass (120). The acceleration sensor (100) has, in addition, second trim electrodes (150), which are connected to the substrate (110) and associated with the first trim electrodes (140), and detection electrodes (170), which are connected to the substrate (110) and associated with the sensor electrodes (160). The sensor electrodes (160) and the detection electrodes (170) are suitable for deflecting the sensor mass (120) along the movement axis (x) and for measuring a first electrostatic force that is exerted on the sensor mass (120) by the sensor electrodes (160) and the detection electrodes (170). A second electrostatic force is produced on the sensor mass (120) by applying an electric trim voltage between the first trim electrodes (140) and the second trim electrodes (150).