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A controller 5 includes: a deformation information obtaining unit 113 configured to obtain information on deformation of a suction portion that sucks an object W with negative pressure, and that is deformed by the negative pressure; and an operation control unit 13 configured to control movement of...

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Bibliographische Detailangaben
Hauptverfasser: KOGA, Hiroki, DOI, Sayaka, KAWAKAMI, Shinji, KARAKO, Yukihisa
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A controller 5 includes: a deformation information obtaining unit 113 configured to obtain information on deformation of a suction portion that sucks an object W with negative pressure, and that is deformed by the negative pressure; and an operation control unit 13 configured to control movement of the suction portion 112 in accordance with deformation of the suction portion 112.