PHASE-MODIFIED QUASI-NON-DIFFRACTING LASER BEAMS FOR HIGH ANGLE LASER PROCESSING OF TRANSPARENT WORKPIECES

A method for processing a transparent workpiece that includes directing a laser beam the transparent workpiece. The laser beam incident to the impingement surface has an oblong angular spectrum and portion of the laser beam directed into the transparent workpiece is a laser beam focal line and gener...

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Bibliographische Detailangaben
Hauptverfasser: SAVIDIS, Nickolaos, UNGARO, Craig John Mancusi, STERLINGOV, Petr Mikhaylovich, IVANOV, Viacheslav Viacheslavovich, KALITEEVSKIY, Nikolay Alekseyevich, TERBRUEGGEN, Ralf Joachim
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A method for processing a transparent workpiece that includes directing a laser beam the transparent workpiece. The laser beam incident to the impingement surface has an oblong angular spectrum and portion of the laser beam directed into the transparent workpiece is a laser beam focal line and generates an induced absorption to produce a defect within the transparent workpiece. The laser beam focal line includes a wavelength λ, a spot size wo, a Rayleigh range ZR that is greater thanFD⁢π⁢⁢wo2λ,where FD is a dimensionless divergence factor comprising a value of 10 or greater, and an internal beam angle of greater than 10° relative to a plane orthogonal to an impingement surface at an impingement location, such that the defect has a defect angle within the transparent workpiece of greater than 10° relative to a plane orthogonal to the impingement surface at the impingement location.