MIRROR DEVICE FOR AN INTERFEROMETER DEVICE, INTERFEROMETER DEVICE AND METHOD FOR PRODUCING A MIRROR DEVICE

The invention relates to a mirror device (1) for an interferometer device (1), comprising: a first mirror layer (2) and a second mirror layer (3), which are arranged in parallel on top of one another and spaced apart from one another by a mirror layer spacing (d23), wherein the mirror layer spacing...

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Bibliographische Detailangaben
Hauptverfasser:	ROEDEL, Reinhold, SCHELLING, Christoph, KRAEMMER, Christoph Daniel
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	COLORIMETRY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS RADIATION PYROMETRY TESTING
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Beschreibung
Zusammenfassung:	The invention relates to a mirror device (1) for an interferometer device (1), comprising: a first mirror layer (2) and a second mirror layer (3), which are arranged in parallel on top of one another and spaced apart from one another by a mirror layer spacing (d23), wherein the mirror layer spacing (d23) forms an intermediate space (5) between the first and the second mirror layer (2, 3), and wherein the intermediate space (5) includes a gas or a vacuum; and at least one spacing structure (4) which extends at least partially between the first and the second mirror layer (2, 3), and wherein the spacing structure (4) has a material that is the same as or different from the first and/or second mirror layer (2, 3).