METHOD OF ALIGNING A CHARGED PARTICLE BEAM APPARATUS

METHOD OF ALIGNING A CHARGED PARTICLE BEAM APPARATUS

The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MACHEK, Ondrej, Schoenmakers, Remco, KAPLENKO, Mykola, KAPLENKO, Oleksii
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.