OZONE SUPPLYING DEVICE AND OZONE SUPPLYING METHOD

A high concentration of ozone, which remains at the time of a former supply process, is leaked out and is discarded, at the time of a following adsorption process. For this reason, an ozone supply apparatus is provided with a first adsorption - desorption tower (3a) and a second adsorption - desorpt...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	WADA, Noboru, MATSUURA, Yoko
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A high concentration of ozone, which remains at the time of a former supply process, is leaked out and is discarded, at the time of a following adsorption process. For this reason, an ozone supply apparatus is provided with a first adsorption - desorption tower (3a) and a second adsorption - desorption tower (3b), a gas circuit of exhaust use (R0) which discharges a gas, that is discharged from the first adsorption - desorption tower (3a), to the outside of the ozone supply apparatus, a gas circuit of adsorption recovery use (R1) which discharges a gas discharged from the first adsorption - desorption tower (3 a) to the outside portion of the ozone supply apparatus, after passing the gas through the second adsorption - desorption tower (3b), a circuit switching device (5) which switches a flow path of the gas circuit of exhaust use (R0) and the gas circuit of adsorption recovery use (R1), and a control part (6) which controls an opening and closing of the circuit switching device (5), according to a state of the first adsorption - desorption tower (3a) and a state of the second adsorption - desorption tower (3b).