A DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD

A DEVICE COMPRISING AN ANODIC POROUS REGION SURROUNDED BY A TRENCH HAVING AN ELECTRICAL ISOLATION BARRIER, AND CORRESPONDING METHOD

The present invention relates to an electrical device comprising:a metal barrier layer (102),an anodic porous oxide region (AAO) on the metal barrier layer,a trench (104) around the anodic porous oxide region reaching the metal barrier layer,a liner (107) at least on the wall (106) of the trench on...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VOIRON, Frédéric, SOULIER, Brigitte
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
APPARATUS THEREFOR
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
CHEMISTRY
ELECTRICITY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
METALLURGY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
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Beschreibung
Zusammenfassung:The present invention relates to an electrical device comprising:a metal barrier layer (102),an anodic porous oxide region (AAO) on the metal barrier layer,a trench (104) around the anodic porous oxide region reaching the metal barrier layer,a liner (107) at least on the wall (106) of the trench on the side of the anodic porous oxide region forming an electrical isolation barrier and having an opening (109) onto the anodic porous oxide region,a hard mask (108) arranged above the trenches and the liner having an opening (109) onto the anodic porous oxide region.The invention also relates to the corresponding manufacturing method.