METHOD OF MANUFACTURING HEAD CHIP AND METHOD OF MANUFACTURING LIQUID JET HEAD

There are provided a method of manufacturing a head chip capable of suppressing the occurrence of the failure in the process of forming the actuator plate to thereby increase the yield ratio, and a method of manufacturing a liquid jet head using the above method of manufacturing a head chip. The met...

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Bibliographische Detailangaben
Hauptverfasser: KUBOTA, Yuzuru, IROKAWA, Daiki, MUNAKATA, Suguru, NAKAMURA, Yuji
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:There are provided a method of manufacturing a head chip capable of suppressing the occurrence of the failure in the process of forming the actuator plate to thereby increase the yield ratio, and a method of manufacturing a liquid jet head using the above method of manufacturing a head chip. The method of manufacturing a head chip (41) is a method of manufacturing a head chip (41) having an actuator plate (411) adapted to apply pressure to liquid so as to jet the liquid. Forming the actuator plate includes forming a plurality of grooves (C1d, C1e) on a surface of a piezoelectric substrate (411Z) having one end (411E1) and the other end (411E2) so as to extend from the one end side toward the other end side, forming a conductive film (F) on the surface of the piezoelectric substrate provided with the plurality of grooves, forming a laser processing area (LA) in the conductive film between the grooves adjacent to each other by performing laser processing from a start point (Ps) on the one end side of the piezoelectric substrate to an end point on the other end side, and forming a surface removal area in at least a part including the start point and the end point out of the surface of the piezoelectric substrate by performing surface removal processing in a direction crossing the direction in which the laser processing is performed.