METHOD AND STRUCTURE FOR SENSORS ON GLASS

A method for providing a semiconductor layer arrangement on a substrate which comprises providing a semiconductor layer arrangement having a functional layer and a semiconductor substrate layer, attaching the semiconductor layer arrangement to a glass substrate layer such that the functional layer i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KRUMBEIN, Ulrich, JOST, Stefan, AHRENS, Carsten, PINDL, Stephan
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A method for providing a semiconductor layer arrangement on a substrate which comprises providing a semiconductor layer arrangement having a functional layer and a semiconductor substrate layer, attaching the semiconductor layer arrangement to a glass substrate layer such that the functional layer is arranged between the glass substrate layer and the semiconductor substrate layer, and removing the semiconductor substrate layer at least partially such that the glass substrate layer substitutes the semiconductor substrate layer as the substrate of the semiconductor layer arrangement.