SENSOR AND DISTANCE MEASURING INSTRUMENT

A sensor including: a semiconductor substrate (41) having a first surface (S1) and a second surface (S2) opposed to each other, and including an avalanche photodiode; an on-chip lens (71) provided on side of the first surface (S1) of the semiconductor substrate (41); a first reflective member (73) p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: TAKATSUKA, Yusuke
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A sensor including: a semiconductor substrate (41) having a first surface (S1) and a second surface (S2) opposed to each other, and including an avalanche photodiode; an on-chip lens (71) provided on side of the first surface (S1) of the semiconductor substrate (41); a first reflective member (73) provided on the on-chip lens (71); and a wiring layer (42) provided on side of the second surface (S2) of the semiconductor substrate (41), and including a second reflective member (104).