VERTICAL CAVITY LIGHT-EMITTING ELEMENT

A vertical cavity surface emitting device includes a substrate, a first multilayer film reflecting mirror, a light-emitting structure layer, and a second multilayer film reflecting mirror. The first multilayer film reflecting mirror is formed on the substrate. The light-emitting structure layer is f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KURAMOTO, Masaru, KOBAYASHI, Seiichiro
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A vertical cavity surface emitting device includes a substrate, a first multilayer film reflecting mirror, a light-emitting structure layer, and a second multilayer film reflecting mirror. The first multilayer film reflecting mirror is formed on the substrate. The light-emitting structure layer is formed on the first multilayer film reflecting mirror. The light-emitting structure layer includes a light-emitting layer. The second multilayer film reflecting mirror is formed on the light-emitting structure layer. The second multilayer film reflecting mirror constitutes a resonator between the first multilayer film reflecting mirror and the second multilayer film reflecting mirror. The second multilayer film reflecting mirror includes a first multilayer film, an intermediate film, and a second multilayer film. The first multilayer film has low refractive index films made of a low refractive index material and high refractive index films made of a high refractive index material having a refractive index higher than a refractive index of the low refractive index material. The low refractive index films and the high refractive index films are alternately stacked. The intermediate film covers an upper surface of the first multilayer film. The intermediate film has a translucency to a light emitted from the light-emitting layer. The second multilayer film is formed to partially cover an upper surface of the intermediate film. The second multilayer film has low refractive index films made of the low refractive index material and high refractive index films made of the high refractive index material. The low refractive index films and the high refractive index films are alternately stacked. The intermediate film has a film thickness based on 1/2 of a wavelength inside the intermediate film of a light emitted from the light-emitting layer.