METHOD OF FORMING CNT-BNNT NANOCOMPOSITE PELLICLE

Embodiments of the present disclosure generally relate to nanocomposite pellicles for extreme ultraviolet lithography systems. A pellicle comprises a plurality of carbon nanotubes arranged in a planar sheet formed from a plurality of metal catalyst droplets. The plurality of carbon nanotubes are coa...

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Bibliographische Detailangaben
Hauptverfasser:	CHATTERJEE, Sukti, MELNIK, Yuriy, NARWANKAR, Pravin K
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ADHESIVES APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY CINEMATOGRAPHY DYES ELECTROGRAPHY HOLOGRAPHY MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MATERIALS THEREFOR MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NANOTECHNOLOGY NATURAL RESINS ORIGINALS THEREFOR PAINTS PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS POLISHES PREPARATION OF CARBON BLACK SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES THEIR RELEVANT APPARATUS TRANSPORTING TREATMENT OF INORGANIC MATERIALS, OTHER THAN FIBROUS FILLERS,TO ENHANCE THEIR PIGMENTING OR FILLING PROPERTIES
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Beschreibung
Zusammenfassung:	Embodiments of the present disclosure generally relate to nanocomposite pellicles for extreme ultraviolet lithography systems. A pellicle comprises a plurality of carbon nanotubes arranged in a planar sheet formed from a plurality of metal catalyst droplets. The plurality of carbon nanotubes are coated in a first conformal layer of boron nitride. The pellicle may comprise a plurality of boron nitride nanotubes formed simultaneously as the first conformal layer of boron nitride. The pellicle may comprise a carbon nanotube coating disposed on the first conformal layer of boron nitride and a second conformal layer of boron nitride or boron nitride nanotubes disposed on the carbon nanotube coating. The pellicle is UV transparent and is non-reactive in hydrogen radical environments.