EXCIMER LASER PULSE ENERGY STABILITY CONTROL METHOD AND SYSTEM

A control method for stabilizing excimer laser pulse energy is provided, including: first obtaining a measured energy value of the n-th pulse in a pulse sequence; calculating the difference between the measured energy value and the preset energy value; taking the z-th pulse of the sequence as a demarcation point, when n is a positive integer less than z, the discharge voltage value of the next pulse is calculated according to a first mathematical model, and otherwise when n is an integer greater than z-1, the discharge voltage value of the next pulse is calculated according to a second mathematical model; finally, the next pulse is generated according to the discharge voltage value. This control method can effectively control the energy overshoot phenomenon in each pulse sequence and the energy stability of all pulses in a pulse sequence. A control system based on the control method includes: a high-voltage discharge module, a laser cavity, a laser parameter measurement module, and an energy stability controller. The control system has a simple structure, and only a small amount of energy needs to be separated to realize the energy stability control of the system.