VERTICAL-CAVITY SURFACE-EMITTING LASER
A vertical-cavity surface-emitting laser (VCSEL) according to one embodiment of the present disclosure comprises: a lower mirror; an upper mirror; an active layer interposed between the lower mirror and the upper mirror; an aperture forming layer interposed between the upper mirror and the active la...
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| Hauptverfasser: | , , , , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A vertical-cavity surface-emitting laser (VCSEL) according to one embodiment of the present disclosure comprises: a lower mirror; an upper mirror; an active layer interposed between the lower mirror and the upper mirror; an aperture forming layer interposed between the upper mirror and the active layer and having an oxide layer and a window layer surrounded by the oxide layer; and a plurality of oxide holes penetrating through the upper mirror and the aperture forming layer, wherein the upper mirror comprises an insulating region formed by ion implantation and an isolated region surrounded by the insulating region, and the plurality of oxide holes are arranged in the isolated region. |
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