ACIDIC AQUEOUS COMPOSITION FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT

The invention relates to an acidic aqueous composition for electrolytic copper plating, the composition comprising(i) copper (II) ions,(ii) one or more than one suppressor consisting of or comprising- one single N-heteroaromatic mono-ring, said mono-ring comprising at least two ring nitrogen atoms a...

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Hauptverfasser: Palm, Jens, Schmidt, Ralf, Jha, Himendra, Rohland, Willi, Gaida, Josef
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Sprache:eng ; fre ; ger
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creator Palm, Jens
Schmidt, Ralf
Jha, Himendra
Rohland, Willi
Gaida, Josef
description The invention relates to an acidic aqueous composition for electrolytic copper plating, the composition comprising(i) copper (II) ions,(ii) one or more than one suppressor consisting of or comprising- one single N-heteroaromatic mono-ring, said mono-ring comprising at least two ring nitrogen atoms and one or more than one substituent covalently connected to one of said ring nitrogen atoms and/or a ring carbon atom, wherein said substituent independently is or comprises- one or more than one linear or branched polyalkylene glycol moiety,and/or- one or more than one linear or branched polyalkylene glycol block polyalkylene glycol, or random polyalkylene glycol moiety,with the proviso that- if said suppressor comprises a OH group, then it is a terminal OH group of said polyalkylene glycol moiety, polyalkylene glycol block polyalkylene glycol, and random polyalkylene glycol moiety, respectively, and- said suppressor does not comprise NH2 groups, halogen atoms, and sulfur atoms;a method of electrolytic copper plating using the acidic aqueous composition; and specific suppressors as defined above.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_EP3901331A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>EP3901331A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_EP3901331A13</originalsourceid><addsrcrecordid>eNrjZPB2dPZ08XRWcAwMdfUPDVZw9vcN8A_2DPH091Nw8w9ScPVxdQ4J8veJDPF0dvTxiVRwcYXI-7krOAJVBwS4BsHEeBhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvGuAsaWBobGxoaOhMRFKAGFkLZo</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>ACIDIC AQUEOUS COMPOSITION FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT</title><source>esp@cenet</source><creator>Palm, Jens ; Schmidt, Ralf ; Jha, Himendra ; Rohland, Willi ; Gaida, Josef</creator><creatorcontrib>Palm, Jens ; Schmidt, Ralf ; Jha, Himendra ; Rohland, Willi ; Gaida, Josef</creatorcontrib><description>The invention relates to an acidic aqueous composition for electrolytic copper plating, the composition comprising(i) copper (II) ions,(ii) one or more than one suppressor consisting of or comprising- one single N-heteroaromatic mono-ring, said mono-ring comprising at least two ring nitrogen atoms and one or more than one substituent covalently connected to one of said ring nitrogen atoms and/or a ring carbon atom, wherein said substituent independently is or comprises- one or more than one linear or branched polyalkylene glycol moiety,and/or- one or more than one linear or branched polyalkylene glycol block polyalkylene glycol, or random polyalkylene glycol moiety,with the proviso that- if said suppressor comprises a OH group, then it is a terminal OH group of said polyalkylene glycol moiety, polyalkylene glycol block polyalkylene glycol, and random polyalkylene glycol moiety, respectively, and- said suppressor does not comprise NH2 groups, halogen atoms, and sulfur atoms;a method of electrolytic copper plating using the acidic aqueous composition; and specific suppressors as defined above.</description><language>eng ; fre ; ger</language><subject>APPARATUS THEREFOR ; CHEMISTRY ; ELECTROFORMING ; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ; HETEROCYCLIC COMPOUNDS ; METALLURGY ; ORGANIC CHEMISTRY ; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211027&amp;DB=EPODOC&amp;CC=EP&amp;NR=3901331A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20211027&amp;DB=EPODOC&amp;CC=EP&amp;NR=3901331A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Palm, Jens</creatorcontrib><creatorcontrib>Schmidt, Ralf</creatorcontrib><creatorcontrib>Jha, Himendra</creatorcontrib><creatorcontrib>Rohland, Willi</creatorcontrib><creatorcontrib>Gaida, Josef</creatorcontrib><title>ACIDIC AQUEOUS COMPOSITION FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT</title><description>The invention relates to an acidic aqueous composition for electrolytic copper plating, the composition comprising(i) copper (II) ions,(ii) one or more than one suppressor consisting of or comprising- one single N-heteroaromatic mono-ring, said mono-ring comprising at least two ring nitrogen atoms and one or more than one substituent covalently connected to one of said ring nitrogen atoms and/or a ring carbon atom, wherein said substituent independently is or comprises- one or more than one linear or branched polyalkylene glycol moiety,and/or- one or more than one linear or branched polyalkylene glycol block polyalkylene glycol, or random polyalkylene glycol moiety,with the proviso that- if said suppressor comprises a OH group, then it is a terminal OH group of said polyalkylene glycol moiety, polyalkylene glycol block polyalkylene glycol, and random polyalkylene glycol moiety, respectively, and- said suppressor does not comprise NH2 groups, halogen atoms, and sulfur atoms;a method of electrolytic copper plating using the acidic aqueous composition; and specific suppressors as defined above.</description><subject>APPARATUS THEREFOR</subject><subject>CHEMISTRY</subject><subject>ELECTROFORMING</subject><subject>ELECTROLYTIC OR ELECTROPHORETIC PROCESSES</subject><subject>HETEROCYCLIC COMPOUNDS</subject><subject>METALLURGY</subject><subject>ORGANIC CHEMISTRY</subject><subject>PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPB2dPZ08XRWcAwMdfUPDVZw9vcN8A_2DPH091Nw8w9ScPVxdQ4J8veJDPF0dvTxiVRwcYXI-7krOAJVBwS4BsHEeBhY0xJzilN5oTQ3g4Kba4izh25qQX58anFBYnJqXmpJvGuAsaWBobGxoaOhMRFKAGFkLZo</recordid><startdate>20211027</startdate><enddate>20211027</enddate><creator>Palm, Jens</creator><creator>Schmidt, Ralf</creator><creator>Jha, Himendra</creator><creator>Rohland, Willi</creator><creator>Gaida, Josef</creator><scope>EVB</scope></search><sort><creationdate>20211027</creationdate><title>ACIDIC AQUEOUS COMPOSITION FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT</title><author>Palm, Jens ; Schmidt, Ralf ; Jha, Himendra ; Rohland, Willi ; Gaida, Josef</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_EP3901331A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; ger</language><creationdate>2021</creationdate><topic>APPARATUS THEREFOR</topic><topic>CHEMISTRY</topic><topic>ELECTROFORMING</topic><topic>ELECTROLYTIC OR ELECTROPHORETIC PROCESSES</topic><topic>HETEROCYCLIC COMPOUNDS</topic><topic>METALLURGY</topic><topic>ORGANIC CHEMISTRY</topic><topic>PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</topic><toplevel>online_resources</toplevel><creatorcontrib>Palm, Jens</creatorcontrib><creatorcontrib>Schmidt, Ralf</creatorcontrib><creatorcontrib>Jha, Himendra</creatorcontrib><creatorcontrib>Rohland, Willi</creatorcontrib><creatorcontrib>Gaida, Josef</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Palm, Jens</au><au>Schmidt, Ralf</au><au>Jha, Himendra</au><au>Rohland, Willi</au><au>Gaida, Josef</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>ACIDIC AQUEOUS COMPOSITION FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT</title><date>2021-10-27</date><risdate>2021</risdate><abstract>The invention relates to an acidic aqueous composition for electrolytic copper plating, the composition comprising(i) copper (II) ions,(ii) one or more than one suppressor consisting of or comprising- one single N-heteroaromatic mono-ring, said mono-ring comprising at least two ring nitrogen atoms and one or more than one substituent covalently connected to one of said ring nitrogen atoms and/or a ring carbon atom, wherein said substituent independently is or comprises- one or more than one linear or branched polyalkylene glycol moiety,and/or- one or more than one linear or branched polyalkylene glycol block polyalkylene glycol, or random polyalkylene glycol moiety,with the proviso that- if said suppressor comprises a OH group, then it is a terminal OH group of said polyalkylene glycol moiety, polyalkylene glycol block polyalkylene glycol, and random polyalkylene glycol moiety, respectively, and- said suppressor does not comprise NH2 groups, halogen atoms, and sulfur atoms;a method of electrolytic copper plating using the acidic aqueous composition; and specific suppressors as defined above.</abstract><oa>free_for_read</oa></addata></record>
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subjects APPARATUS THEREFOR
CHEMISTRY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
HETEROCYCLIC COMPOUNDS
METALLURGY
ORGANIC CHEMISTRY
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
title ACIDIC AQUEOUS COMPOSITION FOR ELECTROLYTICALLY DEPOSITING A COPPER DEPOSIT
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T10%3A30%3A37IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Palm,%20Jens&rft.date=2021-10-27&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EEP3901331A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true