METHOD FOR PRODUCING PURIFIED CHLOROSILANES
Provided is a method for manufacturing refined chlorosilane, the method being characterized in that crude chlorosilane, such as crude trichlorosilane and crude silicon tetrachloride and containing a boron compound and/or a phosphorous compound, is brought into contact with chlorine (preferably 1-300...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Provided is a method for manufacturing refined chlorosilane, the method being characterized in that crude chlorosilane, such as crude trichlorosilane and crude silicon tetrachloride and containing a boron compound and/or a phosphorous compound, is brought into contact with chlorine (preferably 1-3000ppm mole with respect to 1 mole of crude chlorosilane) in the presence of alkylphenol such as 2-methylphenol, and then distilled. |
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