DEVICE WITH ARRAY OF LIGHT-EMITTING AND/OR LIGHT-RECEIVING DIODES
Photo-emitting and/or photo-receiving diode array device, comprising:a stack of first and second semiconductor layers doped according to different types;first trenches passing through the stack and surrounding a region of the stack wherein several diodes are formed;dielectric portions arranged in th...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | Photo-emitting and/or photo-receiving diode array device, comprising:a stack of first and second semiconductor layers doped according to different types;first trenches passing through the stack and surrounding a region of the stack wherein several diodes are formed;dielectric portions arranged in the first trenches and covering lateral flanks of said region over the entire thickness of the second layer and a first part of the thickness of the first layer;first electrically conductive portions arranged in the first trenches and covering the lateral flanks of said region over a second part of the thickness of the first layer, and forming first electrodes of the diodes of said region;at least one second trench partially passing through the first layer and separating the portions of the first layer from the diodes of said region. |
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