DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER

DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER

A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the la...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PETTIBONE, Donald, BRUTSCH, Martin, CHEN, Li-Min, SAERCHEN, Emanuel, FLORENDO, Oscar G
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.