CHIP MOLDING STRUCTURE, WAFER LEVEL CHIP SCALE PACKAGING STRUCTURE AND MANUFACTURING METHOD THEREOF
A chip molding structure, a wafer level chip scale packaging structure and manufacturing methods thereof are disclosed, relating to the technical field of semiconductor production. The method of making a wafer level chip scale packaging structure includes: providing a wafer, comprising a plurality o...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A chip molding structure, a wafer level chip scale packaging structure and manufacturing methods thereof are disclosed, relating to the technical field of semiconductor production. The method of making a wafer level chip scale packaging structure includes: providing a wafer, comprising a plurality of bottom chips; bonding the wafer with a carrier; dicing the wafer to separate the plurality of bottom chips from a plurality of peripheral portions; removing the plurality of peripheral portions; and molding the plurality of bottom chips with a mold to form the molding structure. By dicing the wafer into independent bottom chips and peripheral portions, with the peripheral portions being removed before molding, the bottom chips may be prevented from being damaged during the molding. Compared with existing technologies, the packaging quality and production yield are improved. |
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