CLEANING METHOD FOR WORKPIECE AND CLEANING APPARATUS

CLEANING METHOD FOR WORKPIECE AND CLEANING APPARATUS

Provided is a cleaning method capable of eliminating the cleaning the unrequired cleaning points. The cleaning method for a workpiece (17) with foreign matter (33i) adhered, the cleaning method including: identifying a cleaning points (33ml, 33m2) of the workpiece (17) with the foreign matter (33i)...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: KAWAMORI, Yoshiteru
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:Provided is a cleaning method capable of eliminating the cleaning the unrequired cleaning points. The cleaning method for a workpiece (17) with foreign matter (33i) adhered, the cleaning method including: identifying a cleaning points (33ml, 33m2) of the workpiece (17) with the foreign matter (33i) adhered; substituting a true value to a cleaning variable (33hc) for the identified cleaning points (33ml, 33m2); generating a cleaning liquid jet (47) from a main nozzle (15); skipping a first cleaning section (33f3) if the cleaning variable (33hc) has a false value; and executing the first cleaning section (33f3) to direct the main nozzle (15) toward the cleaning points (33m) if the cleaning variable (33hc) has a true value.