CARBON MEMBRANE FOR FLUID SEPARATION USE
An object of the present invention is to suppress a defect in a carbon membrane for fluid separation use with a dense carbon layer formed on a porous carbon support. The present invention is a carbon membrane for fluid separation use, including a dense carbon layer formed on a porous carbon support,...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | An object of the present invention is to suppress a defect in a carbon membrane for fluid separation use with a dense carbon layer formed on a porous carbon support. The present invention is a carbon membrane for fluid separation use, including a dense carbon layer formed on a porous carbon support, wherein X < Y when the ratio of the content of silicon atoms to the total content of carbon atoms and silicon atoms at the center position in the membrane thickness direction of the porous carbon support is X (atomic%), and the ratio of the content of silicon atoms to the total content of carbon atoms and silicon atoms at the position of 3 µm from the interface between the porous carbon support and the dense carbon layer to the porous carbon support side is Y (atomic%). |
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