MICROFLUIDIC EJECTION CHIP, HEAD, DISPENSING DEVICE AND METHOD FOR FORMING THE SAME

MICROFLUIDIC EJECTION CHIP, HEAD, DISPENSING DEVICE AND METHOD FOR FORMING THE SAME

A microfluidic ejection chip (22) includes a silicon substrate (30) having a fluid passageway (36). The fluid passageway (36) is defined by a silicon sidewall (30-2) of the silicon substrate (30) that is covered by a permanent passivation layer (38) to protect the silicon sidewall (30-2) from exposu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BERNARD, David L, WEAVER, Sean T
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Zusammenfassung:A microfluidic ejection chip (22) includes a silicon substrate (30) having a fluid passageway (36). The fluid passageway (36) is defined by a silicon sidewall (30-2) of the silicon substrate (30) that is covered by a permanent passivation layer (38) to protect the silicon sidewall (30-2) from exposure to an acidic fluid. The permanent passivation layer (38) is retained on the silicon sidewall (30-2) at a conclusion of etching of the silicon substrate (30) to form the fluid passageway (36).