THIN-FILM TRANSISTOR SUBSTRATE, DISPLAY APPARATUS INCLUDING THE SAME, AND METHOD OF MANUFACTURING DISPLAY APPARATUS

THIN-FILM TRANSISTOR SUBSTRATE, DISPLAY APPARATUS INCLUDING THE SAME, AND METHOD OF MANUFACTURING DISPLAY APPARATUS

Provided are a thin film transistor substrate which include a substrate, a buffer layer and a thin film transistor, a display apparatus including the thin film transistor substrate, and a method of manufacturing the display apparatus including the thin film transistor substrate. The buffer layer inc...

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Bibliographische Detailangaben
Hauptverfasser: Lee, Jinsuk, Hwang, Youngin, Jung, Sugwoo, Jo, Yongseon, Lee, Nalae, Lee, Jongmin, Lee, Illhwan, Jo, Joohyeon, Jeon, Jin, Choi, Shinbeom, Kwak, Changha, Kim, Byungno, EBISUNO, Kohei, Kim, Heeyeon
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:Provided are a thin film transistor substrate which include a substrate, a buffer layer and a thin film transistor, a display apparatus including the thin film transistor substrate, and a method of manufacturing the display apparatus including the thin film transistor substrate. The buffer layer includes an inorganic insulating layer. An area ratio of a peak corresponding to an N-H bond in the buffer layer is 0.5% or less based on a total peak area in a Fourier transform infrared spectroscopy (FTIR).