DUMMY WAFER

A dummy wafer (100) includes a planar heater (120) and a pair of plate-shaped members (110A, 110B) formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater (120) is sandwiched by the plate-shaped members (110A, 110B).

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KOMIYA, Hiroaki, KATO, Yoshiyasu, NAKAYAMA, Hiroyuki, KASAI, Shigeru, AKAIKE, Yutaka
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A dummy wafer (100) includes a planar heater (120) and a pair of plate-shaped members (110A, 110B) formed of an aluminum alloy, aluminum, or silicon carbide, wherein the planar heater (120) is sandwiched by the plate-shaped members (110A, 110B).