METHOD AND DEVICE FOR DEPOSITING A NANO-OBJECT

A method for depositing an object, including: -approaching, in an enclosure, a holder in the direction of a carrier substrate, then-transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside...

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Bibliographische Detailangaben
Hauptverfasser:	DESJARDINS, Matthieu, CUBAYNES, Tino, DELBECQ, Matthieu, KONTOS, Takis, PALOMO, José, DARTIAILH, Matthieu
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A method for depositing an object, including: -approaching, in an enclosure, a holder in the direction of a carrier substrate, then-transferring, in the enclosure, the object from the holder to an area for depositing the carrier substrate. The transfer step is preferably carried out when the inside of the enclosure is in a vacuum at a pressure below 10−6 bar.