SYSTEMS AND METHODS FOR UNIPOLAR CHARGE BALANCED SEMICONDUCTOR POWER DEVICES

A charge balance (CB) field-effect transistor (FET) device may include a CB layer defined in a first epitaxial (epi) layer having a first conductivity type. The CB layer may include a set of CB regions having a second conductivity type. The CB FET device may further include a device layer defined in...

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Bibliographische Detailangaben
Hauptverfasser: GHANDI, Reza, ARTHUR, Stephen Daley, BOLOTNIKOV, Alexander Viktorovich, LILIENFELD, David Alan, LOSEE, Peter Almern
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A charge balance (CB) field-effect transistor (FET) device may include a CB layer defined in a first epitaxial (epi) layer having a first conductivity type. The CB layer may include a set of CB regions having a second conductivity type. The CB FET device may further include a device layer defined in a device epi layer having the first conductivity type disposed on the CB layer. The device layer may include a highly-doped region having the second conductivity type. The CB FET device may also include a CB bus region having the second conductivity type that extends between and electrically couples a CB region of the set of CB regions of the CB layer to the highly-doped region of the device layer.