MULTIMODALITY MULTIPLEXED ILLUMINATION FOR OPTICAL INSPECTION SYSTEMS

MULTIMODALITY MULTIPLEXED ILLUMINATION FOR OPTICAL INSPECTION SYSTEMS

An inspection system including an illumination subsystem and an image sensing subsystem, the illumination subsystem providing a plurality of illumination modalities, the system simultaneously illuminating at least two areas of an object with different ones of the plurality of illumination modalities...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KATZIR, Yigal, MEIMOUN, Elie, LUTSKER, Ilia
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An inspection system including an illumination subsystem and an image sensing subsystem, the illumination subsystem providing a plurality of illumination modalities, the system simultaneously illuminating at least two areas of an object with different ones of the plurality of illumination modalities, images of which are acquired by a single sensor forming part of the image sensing subsystem.