COMPACT MICROSCOPE
A microscope focus control system has a movable sample stage (19; 304), an objective lens system (18; 301), a focus stability beam optical system to direct a focus stability beam (60) to the objective lens system (18; 301), an imaging apparatus (437), a return optical system to return light to the i...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A microscope focus control system has a movable sample stage (19; 304), an objective lens system (18; 301), a focus stability beam optical system to direct a focus stability beam (60) to the objective lens system (18; 301), an imaging apparatus (437), a return optical system to return light to the imaging apparatus (437), and a control system. The control system is operable to receive a reference image of the focus stability beam (60) from the objective lens system (18; 301), receive a subsequent image of the focus stability beam (60), and control the sample stage (19; 304) in accordance with the reference image and subsequent image. |
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