IMPROVED DEVICE FOR DRYING SEMICONDUCTOR SUBSTRATES

IMPROVED DEVICE FOR DRYING SEMICONDUCTOR SUBSTRATES

Device for drying disc-shaped substrates comprising an elongated body (1),which tapers upwards to form a wedge (A) having an angle α between two surfaces and an upper edge wherein the upper edge is suitable for holding the disc-shaped substrates, characterized in that the two surfaces comprise more...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Rothenaicher, Simon, Geißler, Sebastian
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Device for drying disc-shaped substrates comprising an elongated body (1),which tapers upwards to form a wedge (A) having an angle α between two surfaces and an upper edge wherein the upper edge is suitable for holding the disc-shaped substrates, characterized in that the two surfaces comprise more than one holes (2) each forming channels, which extend to a lower drainage part (B) of the elongated body.