DARK FIELD DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD

A dark field digital holographic microscope is disclosed which is configured to determine a characteristic of interest of a structure (1060). The dark field digital holographic microscope comprises an illumination device configured to provide at least: a first beam pair comprising a first illuminati...

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Bibliographische Detailangaben
Hauptverfasser:	TENNER, Vasco, Tomas, De BOER, Johannes Fitzgerald, PANDEY, Nitesh, DEN BOEF, Arie, Jeffrey, MESSINIS, Christos
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHIC PROCESSES OR APPARATUS HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A dark field digital holographic microscope is disclosed which is configured to determine a characteristic of interest of a structure (1060). The dark field digital holographic microscope comprises an illumination device configured to provide at least: a first beam pair comprising a first illumination beam of radiation (1010) and a first reference beam of radiation (1030) and a second beam pair comprising a second illumination beam of radiation (1020) and a second reference beam of radiation (1040); and one or more optical elements (1080) operable to capture a first scattered radiation (1011) and to capture a second scattered radiation (1021) scattered by the structure resultant from the first and second illumination beams respectively. The beams of the first beam pair are mutually coherent and the beams of the second beam pair are mutually coherent. The illumination device is configured to impose incoherence (AD1, fig 11) between the first beam pair and second beam pair.