MICRO-ELECTRO-MECHANICAL DEVICE WITH A SHOCK-PROTECTED TILTABLE STRUCTURE

The micro-electro-mechanical device is formed by a fixed structure (64) having a cavity (63); a tiltable structure (62) elastically suspended over the cavity (63), having a main extension in a tiltable plane (AB), and rotatable about a rotation axis (B) parallel to the tiltable plane (AB); and a piezoelectric actuation structure (70) including at least a first and a second driving arm (72A, 72B), the first and the second driving arms carrying respective piezoelectric material regions (73) and extending on opposite sides of the rotation axis (B). The first and the second driving arms (72A, 72B) are rigidly coupled to the fixed structure (64) and are elastically coupled to the tiltable structure (62). A stop structure (83A-83D) limits movements of the tiltable structure (62) with respect to the actuation structure (70) along a planar direction (A) perpendicular to the rotation axis (B). The stop structure has a first planar stop element (83A) formed between the first driving arm (72A) and the tiltable structure (62) and a second planar stop element (83B) formed between the second driving arm (72B) and the tiltable structure.