IMPROVED MEMS SWITCH

Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.

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Bibliographische Detailangaben
Hauptverfasser: Lambkin, Paul, Stenson, Bernard, Wong, Jo-ey, Schirmer, Mark, Fitzgerald, Padraig, Goggin, Raymond
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.