ELECTRON MICROSCOPE STAGE

ELECTRON MICROSCOPE STAGE

A positioning system for an electron microscope includes a first carriage 316 comprising a holder 314 for holding a workpiece W and a second carriage 318. The first carriage 316 is coupled to one or more first drive units 320 configured to position the workpiece along first, second, and third axes X...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Visscher, Albert
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A positioning system for an electron microscope includes a first carriage 316 comprising a holder 314 for holding a workpiece W and a second carriage 318. The first carriage 316 is coupled to one or more first drive units 320 configured to position the workpiece along first, second, and third axes X-Z, and along a first tilt β axis Y. The second carriage 318 houses the one or more first drive units and is coupled to one or more second drive units configured to position the workpiece along a second tilt α axis X.