DEVICE FOR CHROMATIC CONFOCAL OPTICAL MEASUREMENT AND CONFOCAL IMAGING OF A MEASUREMENT OBJECT, AND METHOD

The invention relates to a chromatic confocal measurement device having a light source (1), which emits light of a plurality of wavelengths, and a first beam splitter (3). Light from the light source (1) is imaged onto a measurement object via the first beam splitter (3) and an optical imaging eleme...

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Bibliographische Detailangaben

Hauptverfasser:	PICHOT, Jean-Francois, DIETZ, Christoph, SCHÖNLEBER, Martin, ANDRÉ, Stephan
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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