STORAGE SHELF

A storage shelf (1) including a body frame (10) and a shelf plate (20) attached to the body frame (10) with an elastic body (9) interposed therebetween, the storage shelf (1) configured to store therein a FOUP containing a contained object, includes: a feed nozzle (31) provided on the shelf plate (2...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ONISHI, Shinji, TSUBAKI, Tatsuo
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A storage shelf (1) including a body frame (10) and a shelf plate (20) attached to the body frame (10) with an elastic body (9) interposed therebetween, the storage shelf (1) configured to store therein a FOUP containing a contained object, includes: a feed nozzle (31) provided on the shelf plate (20) and configured to feed gas to the FOUP; and a feed tube (33) having one end (33a) communicating with the feed nozzle (31) and the other end (33b) communicating with a main tube (50) connected to a feed source of the gas to be fed to the FOUP, the main tube (50) being supported by the body frame (10). The feed tube (33) has a flexible part having flexibility at least partially between the one end (33a) and the other end (33b).