PRESSURE MEASURING DEVICE AND METHOD FOR PRODUCING SAME

A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to b...

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Bibliographische Detailangaben
Hauptverfasser: WANG, Yanli, SCHMIDT, Elke, CONRADT, Jonas, ROßBERG, Andreas, UEHLIN, Thomas, THAM, Anh Tuan, PONATH, Nils
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A pressure measuring device includes a ceramic pressure sensor including a ceramic measuring membrane and a sensor mounting configured to secure the pressure sensor such that a membrane region of the measuring membrane surrounded by a membrane edge is contactable with a medium having a pressure to be measured. The sensor mounting includes a titanium or titanium alloy mounting element including an opening through which the membrane region is contactable with the medium. The membrane edge is connected directly with the mounting element by a diffusion weld produced by a diffusion welding method.