NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MANUFACTURING THE SAME

A method of making a microfluidic device (200, 201, 300) can include depositing a layer of photoresist onto a first substrate (210, 270, 310), selectively removing the photoresist to expose portions of the first substrate (210, 270, 310), etching the exposed portions of the first substrate (210, 270...

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Bibliographische Detailangaben

Hauptverfasser:	LYNN, Jeffrey Glenn, FANG, Ye, PADDOCK, Barry J, ALLEN, Donald Erwin, ZHANG, Ying, JIANG, Wei
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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