NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MANUFACTURING THE SAME

NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MANUFACTURING THE SAME

A method of making a microfluidic device (200, 201, 300) can include depositing a layer of photoresist onto a first substrate (210, 270, 310), selectively removing the photoresist to expose portions of the first substrate (210, 270, 310), etching the exposed portions of the first substrate (210, 270...

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Bibliographische Detailangaben
Hauptverfasser: LYNN, Jeffrey Glenn, FANG, Ye, PADDOCK, Barry J, ALLEN, Donald Erwin, ZHANG, Ying, JIANG, Wei
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
TRANSPORTING
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Beschreibung
Zusammenfassung:A method of making a microfluidic device (200, 201, 300) can include depositing a layer of photoresist onto a first substrate (210, 270, 310), selectively removing the photoresist to expose portions of the first substrate (210, 270, 310), etching the exposed portions of the first substrate (210, 270, 310) to form an array of nano-wells (240, 340), coating each nano-well (240, 340) with metal oxide, and coating the metal oxide on each nano-well (240, 340) with a first material to increase binding of DNA, proteins, and polynucleotides to the metal oxide. A layer of a second material can be deposited on interstitial areas between the nano-wells (240, 340) to inhibit binding of DNA, proteins, and polynucleotides to the interstitial areas. A second substrate (220, 320) can be bonded to the first substrate (210, 270, 310) to enclose the array of nano-wells (240, 340) in a cavity.