MEASUREMENT SYSTEM AND MEASUREMENT METHOD

In the present invention, an image processing controller outputs a measurement result indicating the three-dimensional shape of an object using a first image obtained by image capture of an object by an imaging part of a first measurement head in a state in which measurement light from a projection...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IIDA, Toyoo, ARIYOSHI, Tomonori
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:In the present invention, an image processing controller outputs a measurement result indicating the three-dimensional shape of an object using a first image obtained by image capture of an object by an imaging part of a first measurement head in a state in which measurement light from a projection part of the first measurement head is projected to the object, and at least one of a second image obtained by image capture of the object by an imaging part of a second measurement head in a state in which the measurement light from the projection part of the first measurement head is projected to the object, and a third image obtained by image capture of the object by the imaging part of the first measurement head in a state in which measurement light from a projection part of the second measurement head is projected to the object.