APPARATUS FOR AND METHOD OF MONITORING AND CONTROLLING DROPLET GENERATOR PERFORMANCE

APPARATUS FOR AND METHOD OF MONITORING AND CONTROLLING DROPLET GENERATOR PERFORMANCE

Apparatus for and method of controlling formation of droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting a nozzle and a sub-system having an electro-actuatable...

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Hauptverfasser: ERSHOV, Alexander, Igorevich, TREES, Dietmar, Uwe, Herbert, ROLLINGER, Bob, DRIESSEN, Theodorus, Wilhelmus, WINKELS, Koen, Gerhardus, VASCHENKO, Georgiy O
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
X-RAY TECHNIQUE
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Zusammenfassung:Apparatus for and method of controlling formation of droplets used to generate EUV radiation that comprise an arrangement producing a laser beam directed to an irradiation region and a droplet source. The droplet source includes a fluid exiting a nozzle and a sub-system having an electro-actuatable element producing a disturbance in the fluid. The droplet source produces a stream that breaks down into droplets that in turn coalesce into larger droplets as they progress towards the irradiation region. The process is controlled by observing the stream at a point where droplets in the stream have not fully coalesced.