PLASMA PROCESSOR

A plasma processing apparatus, for releasing plasma-converted gas from plasma head 14 for performing process, is configured to detect the pressures PA, PB, PC, PD of a gas prior to application of a voltage to electrodes of the plasma head, the gas being supplied from gas supply section 50 to a plasm...

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Bibliographische Detailangaben
1. Verfasser:	JINDO, Takahiro
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Beschreibung
Zusammenfassung:	A plasma processing apparatus, for releasing plasma-converted gas from plasma head 14 for performing process, is configured to detect the pressures PA, PB, PC, PD of a gas prior to application of a voltage to electrodes of the plasma head, the gas being supplied from gas supply section 50 to a plasma head, and allow initiation of process by the plasma processing apparatus based on the detected pressures.