INSPECTION DEVICE AND TEMPERATURE CONTROL METHOD

An apparatus (1) for inspecting an electronic device (D), includes: a placement table (30) on which a substrate (W) having the electronic device (D) provided thereon is placed and including a refrigerant flow path (32a); a light irradiation mechanism (40) having LEDs (41) directed to the substrate (...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJISAWA, Yoshinori, KASAI, Shigeru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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