INSPECTION DEVICE AND TEMPERATURE CONTROL METHOD

An apparatus (1) for inspecting an electronic device (D), includes: a placement table (30) on which a substrate (W) having the electronic device (D) provided thereon is placed and including a refrigerant flow path (32a); a light irradiation mechanism (40) having LEDs (41) directed to the substrate (...

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Bibliographische Detailangaben
Hauptverfasser:	FUJISAWA, Yoshinori, KASAI, Shigeru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An apparatus (1) for inspecting an electronic device (D), includes: a placement table (30) on which a substrate (W) having the electronic device (D) provided thereon is placed and including a refrigerant flow path (32a); a light irradiation mechanism (40) having LEDs (41) directed to the substrate (W); and a controller (13) for controlling heat absorption by the refrigerant and heating by light from the LEDs (41). The controller (13) includes: a temperature information acquisition part (13f) for acquiring information on a temperature of the electronic device (D); a heating controller (13d) for performing the heating control based on the temperature of the electronic device (D) as a current inspection object; and a heat absorption controller (13e) for estimating a transition of power applied to the electronic device (D) at a next inspection based on a transition of the temperature of the electronic device (D) in a past inspection, and performing the heat absorption control at a time of the next inspection.