QUARTZ GLASS PLATE

The present invention is a quartz glass plate having a quartz glass plate body and a quartz glass member adhered to the quartz glass plate body through an adhesive layer, where the adhesive layer contains silica, and a sum of concentrations of Li, Na, and K ions, being alkali metal ions and Ca ions,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MORI, Tatsuya, SATO, Akira, SHIMADA, Atsushi, YOKOSAWA, Yuya, YOSHIDA, Nobumasa
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The present invention is a quartz glass plate having a quartz glass plate body and a quartz glass member adhered to the quartz glass plate body through an adhesive layer, where the adhesive layer contains silica, and a sum of concentrations of Li, Na, and K ions, being alkali metal ions and Ca ions, being alkaline earth metal ions contained in the adhesive layer is 10 ppm by mass or less. Consequently, a step with a uniform thickness can be formed, and a quartz glass plate that is not easily damaged by irradiation with a light containing an ultraviolet ray is provided.